Artículos SCI

The morphology of numerous nanocolumnar thin films deposited by the magnetron sputtering technique at oblique geometries and at relatively low temperatures has been analyzed for materials as different as Au, Pt, Ti, Cr, TiO2, Al, HfN, Mo, V, WO3 and W. Despite similar deposition conditions, two characteristic nanostructures have been identified depending on the material: a first one defined by highly tilted and symmetric nanocolumnar structures with a relatively high film density, and a second one characterized by rather vertical and asymmetric nanocolumns, with a much lower film density. With the help of a model, the two characteristic nanostructures have been linked to different growth dynamics and, specifically, to different surface relaxation mechanisms upon the incorporation of gaseous species with kinetic energies above the surface binding energy. Moreover, in the case of Ti, a smooth structural transition between the two types of growths has been found when varying the value of the power used to maintain the plasma discharge. Based on these results, the existence of different surface relaxation mechanisms is proposed, which quantitatively explains numerous experimental results under the same conceptual framework.

Microacoustic wave devices are essential components in the radio frequency (RF) electronics and microelectromechanical systems (MEMS) industry with increasing impact in various sensing and actuation applications. Reliable and smart operation of acoustic wave devices at low costs will cause a crucial advancement. Herein, this study presents the enablement of temperature and mechanical sensing capabilities in a Rayleigh-mode standing surface acoustic wave (sSAW) chip device by harnessing an acoustic shear-thickness dominant wave (SD) using the same set of electrodes. Most importantly, this mode is excited by switching the polarity of the sSAW transducer electrodes by simple electronics, allowing for direct and inexpensive compatibility with an existing setup. The method in the emergent topic of surface de-icing is validated by continuously monitoring temperature and liquid–solid water phase changes using the SD mode, and on-demand Rayleigh-wave deicing with a negligible energy cost. The flexibility for adapting the system to different scenarios, and loads and the potential for scalability opens the path to impact in lab-on-a-chip, internet of things (IoT) technology, and sectors requiring autonomous acoustic wave actuators.